Video: Active Impulse Decoupling with Eitzenberger
Impulse decoupled nanometer precision stage built by Eitzenberger, powered by Triamec servo drives. Note the completely still machine base when impulse decoupling is on, reducing cross-talk from one axis to another to less than 0.5nm. The magnet yoke is also motorized and controlled.
Eitzenberger develops, manufactures and distributes high-precision air bearings and air-bearing systems for a wide range of applications, including semiconductor manufacturing, optics manufacturing and metrology.